(M. J. Brunger, W. D. Lawrance, P. J. O. Teubner T.Maddern, L.Hargreaves and S.J. Buckman)
The National Facility for Electron Collision Studies with Molecules and Radicals of Technological Interest will provide Australia with a unique facility to measure electron scattering cross sections from molecules and radicals which are of significant technological interest and importance. There is no other facility of this kind being developed in the world. It provides Australia with the opportunity to be involved as a key player in the technology of the future, in particular with low-temperature plasmas and their semi-conductor etch and remediation applications.